Scatterometry -- measuring ever-smaller chip production
As computer chips rapidly continue to evolve, new technologies must be developed to closely monitor the fabrication process and guard against faults at a sub-microscopic level. More than 40 years a...
Scatterometry -- measuring ever-smaller chip production
(PhysOrg.com) -- As computer chips rapidly continue to evolve, new technologies must be developed to closely monitor the fabrication process and guard against faults at a sub-microscopic level.
Mon 22 Feb 10 from PhysOrg
Scatterometry - Measuring Ever-Smaller Chip Production, Mon 22 Feb 10 from AZoNano
Scatterometry, A New Approach to Measuring Defects in 32nm Chips, Sun 28 Feb 10 from R&D Mag
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